| Milton Ohring, 生于1936年，美国史第文斯理工学院材料工程学系教授，在此职位上工作37年期间，一直活跃在讲台。同时，作者还是材料科学、薄膜技术、微电子学等领域的资深研究专家。其他相关著作还有Engineering Materials science,Academic Press(1995),Reliability&failure of electronic Materials &Devices,Academic Press(1998)等。 |
| ForewordtoFirstEdition Preface Acknowledgments AHistoricalPerspective Chapter1 AReviewofMaterialsScience 1.1 Introduction 1.2 Structure 1.3 DefectsinSolids 1.4 BondsandBandsinMaterials 1.5 ThermodynamicsofMaterials 1.6 Kinetics 1.7 Nucleation 1.8 AnIntroductiontoMechanicalBehavior 1.9 Conclusion Exercises References Chapter2 VacuumScienceandTechnology 2.1 Introduction 2.2 KineticTheoryofGases 2.3 GasTransportandPumping 2.4 VacuumPumps 2.5 VacuumSystems 2.6 Conclusion Exercises References Chapter3 Thin-FilmEvaporationProcesses 3.1 Introduction 3.2 ThePhysicsandChemistryofEvaporation 3.3 FilmThicknessUniformityandPurity 3.4 EvaporationHardware 3.5 EvaporationProcessesandApplications 3.6 Conclusion Exercises References Chapter4 Discharges,Plasmas,andIon-SurfaceInteractions 4.1 Introduction 4.2 Plasmas,Discharges,andArcs 4.3 FundamentalsofPlasmaPhysics 4.4 ReactionsinPlasmas 4.5 PhysicsofSputtering 4.6 IonBombardmentModificationofGrowingFilms 4.7 Conclusion Exercises References Chapter5 PlasmaandIonBeamProcessingofThinFilms 5.1 Introduction 5.2 DC,AC,andReactiveSputteringProcesses 5.3 MagnetronSputtering 5.4 PlasmaEtching 5.5 HybridandModifiedPVDProcesses 5.6 Conclusion Exercises References Chapter6 ChemicalVaporDeposition 6.1 Introduction 6.2 ReactionTypes 6.3 ThermodynamicsofCVD 6.4 GasTransport 6.5 FilmGrowthKinetics 6.6 ThermalCVDProcesses 6.7 Plasma-EnhancedCVDProcesses 6.8 SomeCVDMaterialsIssues 6.9 Safety 6.10 Conclusion Exercises References Chapter7 SubstrateSurfacesandThin-FilmNucleation 7.1 Introduction 7.2 AnAtomicViewofSubstrateSurfaces 7.3 ThermodynamicAspectsofNucleation 7.4 KineticProcessesinNucleationandGrowth 7.5 ExperimentalStudiesofNucleationandGrowth 7.6 Conclusion Exercises References Chapter8 Epitaxy 8.1 Introduction 8.2 ManifestationsofEpitaxy 8.3 LatticeMisfitandDefectsinEpitaxialFilms 8.4 EpitaxyofCompoundSemiconductors 8.5 High-TemperatureMethodsforDepositingEpitaxialSemiconductorFilms 8.6 Low-TemperatureMethodsforDepositingEpitaxialSemiconductorFilms 8.7 MechanismsandCharacterizationofEpitaxialFilmGrowth 8.8 Conclusion Exercises References Chapter9 FilmStructure 9.1 Introduction …… Chapter10 CharacterizationofThinFilmsandSurfaces Chapter11 Interdiffusion,Reactions,andTransformationsinThinFilms Chapter12 MechanicalPropertiesofThinFilms Index |
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